Primary vacuum standard for UHV range - Standing experience and present problems

Mapan - Journal of Metrology Society of India

Volumn 24, Issue 2, 2009, Pages 77-88

  Peksa, L ^a   Prazak D ^b   Gronych, T ^a   Repa P ^a   Viear M ^b   Tesar J ^b   Krajieek Z ^b   Stanik F ^b  

^a CHARLES UNIVERSITY   (Czech Republic)

^b CZECH METROLOGY INSTITUTE   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 73349125128     PISSN: 09703950     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12647-009-0010-1     Document Type: Review

References (49)

1. C.R. Tilford 1988 International Comparison of Pressure Standards: A Status Report Journal of Research of the National Bureau of Standards 93 545 549
2. K. Jousten A.R. Filippelli C.R. Tilford F.J. Redgrave 1997 Comparison of the Standards for High and Ultrahigh Vacuum at Three National Standards Laboratories J. Vac. Sci, Technol. A15 2395 2406 1997JVST...15.2395J
3. http://www.bipm.org/en/cipm-mra/
4. http://kcdb.bipm.org/
5. http://kcdb.bipm.org/AppendixC/defaultasp
6. -2 Pa with Respect to Residual Pressure Metrologia 36 493 497 10.1088/0026-1394/36/6/2 1999Metro..36..493J
7. C.R. Tilford S. Dittmann K.E. McCulloh 1988 The National Bureau of Standards Primary High-Vacuum Standard J. Vac. Sci. Technol. A6 2853 2859 1988JVST....6.2853T
8. V.N. Gorobei, Gosudarstvennye Etalony Edinicy Davlenia. Sovremennoe Sostoianie i Perspektivy Razvitia (State Standards of the Pressure Unit. Present Status and Prospective Development). In "Razrabotka, Proizvodstvo, Primenenie i Metrologicheskoe Obespechenie Sredstv Izmerenij Davlenia i Vakuuma". 10th International Scientific Technical Workshop, November 14th-16th 2006 Sankt Peterburg.
9. S.S. Hong Y.H. Shin K.H. Chung 2006 Measurement Uncertainties for Vacuum Standards at Korea Research Institute of Standards and Science J. Vac. Sci. Technol. A24 1831 1838
10. L. Wangkui L. Qiang L. Shiliang Z. Dixin M. Shilong H. Wei M. Qinhua L. Detian L. Zhenghai G. Yueli M. Yang W. Xinhui T. Dongxu L. LiL 1999 Dynamic Flow Method UHV Standard Apparatus Developed by LIP Vacuum 53 167 171 10.1016/S0042-207X(98)00358-3
11. L. Detian, C. Xu, Y. Hongyan, Z. Dixin, F. Weinan and C. Liangzhen, Developments of Vacuum Metrology in China. In: Proceedings of the International Symposium on Pressure and Vacuum, 22-24 September 2003, Acta Metrologica Sinica Press: Beijing, (2003) pp 6-13.
12. Personal Communication with J.C. Legras and P. Otal of LNE.
13. G. Grosse G. Messer 1970 Experiences with Cryopumps in Calibration Devices Vacuum 20 373 376 10.1016/S0042-207X(70)80036-7
14. -9 mbar with a Molecular Beam Method Vakuum Technik 30 226 331
15. B.P. Butler V. Music F.J. Redgrave 1999 Influence of the Orifice Geometry on the Simplification of Transmission Probability Calculations Vacuum 53 163 166 10.1016/S0042-207X(98)00351-0
16. L. Peksa P. Epa T. Gronych J. Tesaø D. Praák 2004 Uncertainty Analysis of the High Vacuum Part of the Orifice-Flow-Type Pressure Standard Vacuum 76 477 489 10.1016/j.vacuum.2004.05.009
17. B.R.F. Kendall 1970 Brownian Motion: Possible Basis for an Ultra Sensitive Vacuum Gauge Vacuum 20 540 541 10.1016/S0042-207X(70)80093-8
18. R.S. Butler B.R.F. Kendall S.M. Rossnagel 1977 The Brownian Motion Pressure Gauge: a Progress Report Vacuum 27 589 593 10.1016/S0042-207X(77)80439- 9
19. B.R.F. Kendall M.F. Vollero L.D. Hinkle 1987 Passive Levitation of Small Particles in Vacuum: Possible Applications to Vacuum Gauging J. Vac. Sci. Technol. A5 2458 2462 1987JVST....5.2458K
20. B.R.F. Kendall D.J. Manzi L.D. Hinkle M.F. Vollero 1987 Summary Abstract: Electrostatic Levitation in Vacuum and Possible Gauge Applications J. Vac. Sci. Technol. A5 3224 3225 1987JVST....5.3224K
21. L.D. Hinkle B.R.F. Kendall 1987 Pressure Dependent Damping of a Particle Levitated in Vacuum J. Vac. Sci. Technol. A8 2802 2805 1990JVST....8.2802H
22. J.K. Fremerey 1982 Spinning Rotor Vacuum Gauges Vacuum 32 685 690 10.1016/0042-207X(82)94048-9
23. G. Reich 1982 Spinning Rotor Viscosity Gauge: A Transfer Standard for the Laboratory or an Accurate Gauge for Vacuum Process Control J. Vac. Sci. Technol. 20 1148 1152 10.1116/1.571592 1982JVST...20.1148R
24. J.K. Fremerey 1985 The Spinning Rotor Vacuum Gauge J. Vac. Sci. Technol. A3 1715 1720 1985JVST....3.1715F
25. G. Messer P. Röhl G. Grosse W. Jitschin 1987 High Vacuum Measured by Spinning Rotor Gauge: Status Report of the Bureau International des Poids et Mesures Intercomparison J. Vac. Sci. Technol. A5 2240 2243
26. S. Dittmann B.E. Lindenau C.R. Tilford 1989 The Molecular Drag Gauge as a Calibration Standard J. Vac. Sci. Technol. A7 3356 3360 1989JVST....7.3356D
27. E. Ueda Y. Hirohata T. Hino T. Yamashina 1993 Lower Limit of Pressure Measurement Using a Spinning Rotor Gauge Vacuum 44 587 589 10.1016/0042-207X(93) 90102-G
28. S. Ichimura S. Sekine K. Kokubun H. Shimizu 1994 Pressure Measurement by Laser Ionization: Direct Counting of Generated Ions by Imaging of Their Spatial Distribution J. Vac. Sci. Technol. A12 1734 1739 1994JVST...12.1734I
29. S. Ichimura S. Sekine K. Kokubun A. Kurokawa H. Shimizu 1994 Direct Estimation of the Ionization Region for XHV Measurement by Laser Ionization J. Vac. Soc. Japan 37 784 785
30. K.F. Poulter 1977 The Calibration of Vacuum Gauges J. Phys. E - Sci. Instr. 10 112 125 10.1088/0022-3735/10/2/002 1977JPhE...10..112P
31. -4 - 10 Pa Vacuum 28 135 141 10.1016/S0042-207X(78)80240-1
32. W. Jitschin 1990 Accuracy of Vacuum Gauges J. Vac. Sci. Technol. A8 948 956 1990JVST....8..948J
33. -7 torr, General Method: Dynamic Expansion.
34. G.N. Peggs, The Dynamic Flow Technique for the Calibration of Vacuum Gauges. Part 2. The Measurement of Gas Throughput. NPL Report MOM 14, October 1975.
35. L. Peksa, T. Gronych, P. Epa, J. Wild, J. Tesaø, D. Pra•ák, Z. Krajíèek and M. Vièar, An Additional Uncertainty of the Throughput Generated by the Constant Pressure Gas Flowmeter, Journal of Physics: Conference Series 100 (2008) 092009 http://herald.iop.org/ JPCS-IVC/m284/crk//link/1473.
36. K. Jousten 1994 Calibration of Total Pressure Gauges in the UHV and XHV Regions J. Vac. Soc. Japan 37 678 685
37. P. Fowler F.J. Brock 1970 Accurate, Wide Range-Ultrahigh-Vacuum Calibration System J. Vac Sci. Technol. 7 507 516 10.1116/1.1315866 1970JVST....7..507F
38. J.C. Labrune J.G. Theobald 1981 New method for the Calibration of Vacuum Gauges Rev. Sci. Instrum. 52 1774 1775 10.1063/1.1136493 1981RScI...52.1774L
39. Ch. M. Gosselin and G.A. Beitel, Development of UHV Measurement, Report No NASA CR-1600 (1970).
40. M. Mura C. Paolini 2007 Use of Getter-catalyst Thin Films for Enhancing Ion Pump Vacuum Performances J. Vac. Sci. Technol. A25 1234 1239
41. R. Giannantonio M. Succi C. Solcia 1997 Combination of a CryoPump and a Non-Evaporable Getter Pump in Applications J. Vac. Sci. Technol. A15 187 191 1997JVST...15..187G
42. K. Odaka S. Ueda 1993 A New Activation Method for Titanium Sublimation Pumps and Its Application to Extremely High Vacuums Vacuum 44 713 715 10.1016/0042-207X(93)90131-S
43. R.E. Clausing, A Large-scale Getter Pumping Experiment Using Vapor Deposited Titanium Films, Trans. Eighth Nat. Vac. Symp. AVS, Pergamon Press, (1961) 345-356.
44. Short Course on Cryo-Pumps, Dr Edgar Braun, Oerlikon Leybold Vacuum, Cologne, Germany, 12 Sep 2007.
45. -12 Torr J. Vac. Sci. Technol. A12 1695 1698 1994JVST...12.1695I
46. H. Enosawa C. Urano T. Kawashima M. Yamamoto 1990 High Throughput Tandem Turbomolecular Pump for Extreme High Vacuum J. Vac. Sci. Technol. A8 2768 2771 1990JVST....8.2768E
47. D.J. Santeler 1971 The Use of Diffusion Pumps for Obtaining Ultraclean Vacuum Environments J. Vac. Sci. Technol. 8 299 307 10.1116/1.1316316 1971JVST....8..299S
48. M.H. Hablanian 1994 Throughput-Type Pumps and Ultra High Vacuum J. Vac. Sci. Technol. A12 897 903 1994JVST...12..897H
49. E.H. Hirsch J. Richards 1974 Pressure Fluctuation in a Diffusion Pump Using Polyphenyl Ether Vacuum 24 123 124 10.1016/0042-207X(74)92455-5