An additional uncertainty of the throughput generated by the constant pressure gas flowmeter

Journal of Physics: Conference Series

Volumn 100, Issue PART 9, 2008, Pages

  Peksa, L ^a   Gronych, T ^a   Repa P ^a   Wild, J ^a   Tesar J ^b   Prazak D ^b   Krajicek Z ^b   Vicar M ^b  

^a CHARLES UNIVERSITY   (Czech Republic)

^b CZECH METROLOGY INSTITUTE   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

BELLOWS; FLOW MEASUREMENT; THROUGHPUT; UNCERTAINTY ANALYSIS; NANOSCIENCE;

CONSTANT PRESSURES; DIRECTLY-DRIVEN; DISPLACERS; ELEVATED TEMPERATURE; GAS FLOW METERS;

FLOWMETERS;

EID: 73349090484     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/100/9/092009     Document Type: Article

References (7)

1. Berg R F and Tison S A 2004 Two Primary Standards for Low Flows of Gases J. Research NIST 109 435-450
2. Li Wangkui, Zhang Dixin, Liu Quiang, Lu Shiliang, Li Detian and Meng Yang 1996 A gas flow standard apparatus Vacuum 47 519-522
3. Jousten K, Messer G and Wandrey D 1993 A precision gas flowmeter for vacuum metrology Vacuum 44 135-141
4. -1 Metrologia 45 46-52
5. Elsey R J 1975 Outgassing of vacuum materials-II Vacuum 25 347-361
6. McCulloh K E, Tilford C R, Ehrlich C D and Long F G 1987 Low range flowmeters for use with vacuum and leak standards J. Vac. Sci. Technol. A 5 376-381
7. Ishikawa Y and Nemanic V 2003 An overview of methods to suppres hydrogen outgassing rate from austenitic stainless with reference to UHV and XHV Vacuum 69 501-512