|
Volumn 15, Issue 4, 1997, Pages 2395-2406
|
Comparison of the standards for high and ultrahigh vacuum at three national standards laboratories
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CALIBRATION;
DEGASSING;
ELECTRON EMISSION;
ION BOMBARDMENT;
IONIZATION;
PRESSURE EFFECTS;
PRESSURE MEASUREMENT;
STANDARDS;
BAYARD-ALPERT GAUGE;
EXTRACTOR GAUGE;
IONIZATION GAUGE;
SPINNING ROTOR GAUGE;
TRANSFER STANDARD;
VACUUM GAGES;
|
EID: 0031190072
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.580754 Document Type: Review |
Times cited : (23)
|
References (19)
|