New, fully automated, primary standard for generating vacuum pressures between 10-10 Pa and 3×10-2 Pa with respect to residual pressure

Metrologia

Volumn 36, Issue 6, 1999, Pages 493-497

  Jousten, K ^a   Menzer, H ^a   Wandrey, D ^a   Niepraschk, R ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ULTRAHIGH VACUUM (UHV); VACUUM PRESSURES;

AUTOMATION; CALIBRATION; FLOWMETERS; ORIFICES; PUMPS; STANDARDS; VACUUM;

PRESSURE MEASUREMENT;

EID: 0033293825     PISSN: 00261394     EISSN: None     Source Type: Journal    
DOI: 10.1088/0026-1394/36/6/2     Document Type: Article

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8. Jousten K., Vacuum, 1998, 49, 359-360.
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