Fabrication and mathematical analysis of an electrochemical microactuator (ECM) using electrodes coated with platinum nano-particles

Microsystem Technologies

Volumn 16, Issue 3, 2010, Pages 381-390

  Lee, Dong Eun ^a   Soper, Steven A ^b   Wang, Wanjun ^a  

^a Louisiana State University   (United States)

^b LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE CONTROL; AG/AGCL; AUXILIARY ELECTRODES; DRIVING MECHANISM; DYNAMIC BEHAVIORS; ELECTROCHEMICAL REACTIONS; EXPANSION AND SHRINKAGE; FLUIDIC COMPONENTS; FUNCTION OF TIME; GAS BUBBLE; GLASS SUBSTRATES; IDEAL GAS LAW; MATHEMATICAL ANALYSIS; MICRO FLUIDIC APPLICATIONS; MICRO FLUIDIC SYSTEM; OPERATION FREQUENCY; PLATINUM NANOPARTICLES; PT BLACK; SURFACE-TO-VOLUME RATIO; UV LITHOGRAPHY; VOLUME CHANGE; WORKING ELECTRODE;

CONTROL SYSTEM ANALYSIS; ELECTRIC DISCHARGE MACHINING; ELECTROCHEMISTRY; ELECTROLYSIS; FABRICATION; GASES; MICROACTUATORS; MICROFLUIDICS; NANOPARTICLES; PLATINUM; SHRINKAGE;

ELECTROCHEMICAL ELECTRODES;

EID: 73349088421     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0940-0     Document Type: Article

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