DEP microactuation of liquids

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 385-388

  Gunji, M ^a   Jones, T B ^b   Washizu, M ^a  

^a KYOTO UNIVERSITY   (Japan)

^b University of Rochester   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTROLYSIS; ELECTROPHORESIS; LIQUIDS; MICROELECTROMECHANICAL DEVICES; POLYIMIDES; SPIN COATING; SUBSTRATES;

DIELECTROPHORETIC (DEP) FORCES;

MICROACTUATORS;

EID: 0035011692     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906557     Document Type: Article

References (0)