Ti-Si-C thin films produced by magnetron sputtering: Correlation between physical properties, mechanical properties and tribological behavior

Journal of Nanoscience and Nanotechnology

Volumn 10, Issue 4, 2010, Pages 2926-2932

  Cunha, L ^a   Vaz, F ^a   Moura, C ^a   Munteanu, D ^b   Lonescu, C ^b   Riviere J P ^c   Le Bourhis, E ^c  

^a UNIVERSITY OF MINHO   (Portugal)

^b TRANSILVANIA UNIVERSITY OF BRASOV   (Romania)

^c UNIVERSITÉ DE POITIERS   (France)

Author keywords

Multifunctional coatings; Sputtering; Ti Si C coatings

Indexed keywords

CARBON CONTENT; CONCENTRATION OF; CRYSTALLINE STRUCTURE; DEFLECTION MEASUREMENT; DEPTH SENSING INDENTATION; FRICTION COEFFICIENTS; HIGH-SPEED STEELS; MECHANICAL BEHAVIOR; METAL CONCENTRATIONS; METALLIC PHASE; MULTIFUNCTIONAL COATINGS; NON-METALLIC ELEMENTS; PIN ON DISC; RESISTIVITY MEASUREMENT; STONEY'S EQUATION; STRUCTURAL CHANGE; TI CONTENT; TI-SI-C COATINGS; TRIBOLOGICAL BEHAVIORS; TYPE STRUCTURES;

COATINGS; CONCENTRATION (PROCESS); CRYSTALLINE MATERIALS; FRICTION; HARDENING; HARDNESS; MECHANICAL PROPERTIES; METALLIC COMPOUNDS; RESIDUAL STRESSES; SILICON; STAINLESS STEEL; STRUCTURAL ANALYSIS; SUBSTRATES; THIN FILMS; TITANIUM CARBIDE; TRIBOLOGY; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

SEMICONDUCTING SILICON COMPOUNDS;

INORGANIC COMPOUND; NANOMATERIAL; SILICATE; SILICON CARBIDE; SILICON DERIVATIVE; TITANIUM; TITANIUM SILICIDE;

ARTICLE; ARTIFICIAL MEMBRANE; CHEMISTRY; CRYSTALLIZATION; ELECTROPLATING INDUSTRY; FRICTION; IMPEDANCE; MAGNETISM; MATERIALS TESTING; MECHANICAL STRESS; METHODOLOGY; NANOTECHNOLOGY; STATISTICS;

CARBON COMPOUNDS, INORGANIC; CRYSTALLIZATION; ELECTRIC IMPEDANCE; ELECTROPLATING; FRICTION; MAGNETICS; MATERIALS TESTING; MEMBRANES, ARTIFICIAL; NANOSTRUCTURES; NANOTECHNOLOGY; SILICATES; SILICON COMPOUNDS; STATISTICS AS TOPIC; STRESS, MECHANICAL; TITANIUM;

EID: 73149094371     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2010.1428     Document Type: Conference Paper

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