Ultradense gold nanostructures fabricated using hydrogen silsesquioxane resist and applications for surface-enhanced Raman spectroscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 2640-2643

  Choi, Sookyung ^a   Yan, Minjun ^a   Adesida, Ilesanmi ^a   Hsu, Keng H ^b   Fang, Nicholas X ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATIVE APPROACH; BIOANALYSIS; GOLD NANOSTRUCTURES; HIGH QUALITY; HIGH RESOLUTION; HSQ RESIST; HYDROGEN SILSESQUIOXANE; LIFT-OFF PROCESS; METAL FILM; METAL NANOSTRUCTURE; PATTERN QUALITY; SERS-ACTIVE SUBSTRATES; SURFACE ENHANCED RAMAN SPECTROSCOPY; SURFACE-ENHANCED RAMAN SCATTERING; ULTRADENSE;

FABRICATION; NANOSTRUCTURES; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SUBSTRATES;

ELECTRON BEAM LITHOGRAPHY;

EID: 72849138778     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3253610     Document Type: Conference Paper

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