Influence of polarization on absorbance modulated subwavelength grating structures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 2941-2946

  Foulkes, J E ^a   Blaikie, R J ^a  

^a UNIVERSITY OF CANTERBURY   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORBANCE MODULATION OPTICAL LITHOGRAPHY; ABSORBANCES; ANALYTICAL TECHNIQUES; DIELECTRIC GRATING; FINITE ELEMENT METHOD SIMULATION; INTENSITY PROFILES; METAL GRATING; MODULATED STRUCTURES; OPTICAL TRANSMISSIONS; PHOTOCHROMIC LAYERS; POLARIZED LIGHT; SUB-WAVE LENGTH GRATING; SUB-WAVELENGTH; TRANSVERSE ELECTRIC POLARIZED LIGHTS; TRANSVERSE-MAGNETIC POLARIZED LIGHTS;

LIGHT POLARIZATION; PHOTOLITHOGRAPHY; POLARIZATION;

LIGHT TRANSMISSION;

EID: 72849131196     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3237098     Document Type: Conference Paper

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