Patterning decomposable polynorbornene with electron beam lithography to create nanochannels

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 2508-2511

  Devlin, Nicole R ^a   Brown, Devin K ^a   Kohl, Paul A ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIRECT WRITE; FABRICATION METHOD; NANO CHANNELS; NANO-CAVITIES; NEGATIVE TONES; POLYNORBORNENES; PROCESSING STEPS; SACRIFICIAL MATERIAL;

ELECTRON BEAM LITHOGRAPHY; ULTRAVIOLET RADIATION;

ELECTRON BEAMS;

EID: 72849113887     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3264658     Document Type: Conference Paper

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