Grazing incident small angle x-ray scattering: A metrology to probe nanopatterned surfaces

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 3238-3243

  Hofmann, T ^a   Dobisz, E ^b   Ocko, B M ^a  

^a BROOKHAVEN NATIONAL LABORATORY   (United States)

^b Hitachi Research   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BRAGG POSITION; GEOMETRICAL PATTERNS; GI-SAXS; GRAZING INCIDENT SMALL-ANGLE X-RAY SCATTERINGS; NANOPATTERNED SURFACES; NANOSCALE ARRAYS; PATTERNED FEATURES; PATTERNED MEDIAS; PERIODIC PATTERN; QUANTITATIVE INFORMATION; REAL-SPACE; SCATTERED INTENSITY; SEM; SILICON SUBSTRATES; SIMULATED SCATTERING; SMALL ANGLE X-RAY SCATTERING; SURFACE PLANES;

SPACE PROBES; X RAY SCATTERING;

SCATTERING;

EID: 72849109195     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3253608     Document Type: Conference Paper

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