Investigation of characteristics of multi-function ZnO thin film deposited with various argon and oxygen ratios

Materials Research Society Symposium Proceedings

Volumn 1174, Issue , 2009, Pages 69-74

  Hsu, Che Wei ^a   Cheng, Tsung Chieh ^b   Yang, Chun Hui ^c   Shen, Yi Ling ^c   Wu, Jong Shin ^a   Wu, Sheng Yao ^b   Huang, Wen Hsien ^c  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^c NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS COATING; GLASS SUBSTRATES; HIGH TRANSMITTANCE; MULTI-FUNCTIONS; RF REACTIVE MAGNETRON SPUTTERING; SURFACE PROFILOMETERS; THICKNESS EFFECT; UV-SHIELDING; UV-VIS SPECTROPHOTOMETERS; VISIBLE REGION; X-RAY DIFFRACTOMETRY; ZNO THIN FILM;

ARGON; COATINGS; CONTACT ANGLE; GLASS; GLASS INDUSTRY; GLASS MANUFACTURE; HYDROPHOBICITY; MAGNETIC FILMS; METALLIC FILMS; NANOSTRUCTURES; OPTICAL FILMS; OPTICAL PROPERTIES; OXYGEN; SEMICONDUCTING ZINC COMPOUNDS; SHIELDING; THIN FILM DEVICES; THIN FILMS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZINC; ZINC OXIDE;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 72749123789     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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