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Volumn 14, Issue 21, 2006, Pages 10073-10077

Developments in realistic design for aperiodic Mo/Si multilayer mirrors

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CODES (SYMBOLS); MOLYBDENUM; REFLECTION;

EID: 33750328331     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.010073     Document Type: Article
Times cited : (66)

References (9)
  • 1
    • 0034272137 scopus 로고    scopus 로고
    • Broadband multilayer mirrors for optimum use of soft x-ray source output
    • Z. Wang and A. G. Michette, “Broadband multilayer mirrors for optimum use of soft x-ray source output,” J. Opt. A: Pure Appl. Opt. 2, 452-457 (2000).
    • (2000) J. Opt. A: Pure Appl. Opt. , vol.2 , pp. 452-457
    • Wang, Z.1    Michette, A.G.2
  • 2
    • 0141831812 scopus 로고    scopus 로고
    • Spectral reflectance tuning of EUV mirrors for metrology applications
    • Proc. SPIE
    • S. Yulin, T. Kuhlmann, T. Feigl, and N. Kaiser, “Spectral reflectance tuning of EUV mirrors for metrology applications,” in Emerging Lithographic Technologies VII, R.L. Engelstad ed., Proc. SPIE 5037, 286-293 (2003).
    • (2003) Emerging Lithographic Technologies VII , vol.5037 , pp. 286-293
    • Yulin, S.1    Kuhlmann, T.2    Feigl, T.3    Kaiser, N.4
  • 3
    • 0035878768 scopus 로고    scopus 로고
    • Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers
    • S. Bajt, D. Stearns, and P. Kearney, “Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers,” J. Appl. Phys. 90, 1017-1025 (2001).
    • (2001) J. Appl. Phys. , vol.90 , pp. 1017-1025
    • Bajt, S.1    Stearns, D.2    Kearney, P.3
  • 5
    • 15844395331 scopus 로고    scopus 로고
    • Genetic algorithm optimization of X-ray multilayer coatings
    • M. Sanchez del Rio ed., Proc. SPIE
    • P. D. Binda, and F. E. Zocchi, “Genetic algorithm optimization of X-ray multilayer coatings,” in Advances in Computational Methods for X-Ray and Neutron Optics, M. Sanchez del Rio ed., Proc. SPIE 5536, 97-108 (2004).
    • (2004) Advances in Computational Methods for X-Ray and Neutron Optics , vol.5536 , pp. 97-108
    • Binda, P.D.1    Zocchi, F.E.2
  • 6
    • 20444496143 scopus 로고    scopus 로고
    • Comparison of the Luus-Jaakola optimization procedure and the genetic algorithm
    • B. Liao and R. Luus, “Comparison of the Luus-Jaakola optimization procedure and the genetic algorithm,” Engineering Optimization 37, 381-398 (2005)
    • (2005) Engineering Optimization , vol.37 , pp. 381-398
    • Liao, B.1    Luus, R.2
  • 8
    • 33750288826 scopus 로고
    • Interference in thin films: Theory
    • (SPIE Optical Engineering Press,), pp
    • E. Spiller, “Interference in thin films: theory,” in Soft X-ray Optics (SPIE Optical Engineering Press, 1994;), pp. 101-107.
    • (1994) Soft X-Ray Optics , pp. 101-107
    • Spiller, E.1
  • 9
    • 0034768492 scopus 로고    scopus 로고
    • Recent developments in EUV reflectometry at the Advanced Light Source
    • E. A. Dobisz ed., Proc. SPIE
    • E. M. Gullikson, S. Mrowka, and B. B. Kaufmann, “Recent developments in EUV reflectometry at the Advanced Light Source,” in Emerging Lithographic Technologies V, E. A. Dobisz ed., Proc. SPIE 4343, 363 (2001).
    • (2001) Emerging Lithographic Technologies V , vol.4343 , pp. 363
    • Gullikson, E.M.1    Mrowka, S.2    Kaufmann, B.B.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.