Reflectance enhancement with sub-quarterwave multilayers of highly absorbing materials

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 18, Issue 6, 2001, Pages 1406-1414

  Larruquert, Juan I ^a  

^a Institute of Physical and Information Technologies   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT ABSORPTION; MULTILAYERS; REFRACTIVE INDEX; ULTRAVIOLET RADIATION;

SOFT X-RAYS;

LIGHT REFLECTION;

EID: 0009616146     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.18.001406     Document Type: Article

References (9)

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2. J. I. Larruquert and R. A. M. Keski-Kuha, “Multilayer coatings with high reflectance in the EUV spectral region from 50 to 121.6 nm,” Appl. Opt. 38, 1231-1236 (1999).
3. J. I. Larruquert and R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb, and evaporated Cr,” Appl. Opt. 39, 2772-2781 (2000).
4. G. M. Blumenstock, R. A. M. Keski-Kuha, and M. L. Ginter, “Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films,” in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover and A. B. Walker, eds., Proc. SPIE 2515, 558-564 (1995).
5. J. I. Larruquert and R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet of thin films of ion-beam-deposited carbon,” Opt. Commun. 183, 437-443 (2000).
6. E. D. Palik, Handbook of Optical Constants of Solids II (Academic, San Diego, Calif., 1998).
7. J. I. Larruquert and R. A. M. Keski-Kuha (unpublished data; see Table I).
8. E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego Calif., 1998).
9. J. A. Mendez, J. I. Larruquert, and J. A. Aznarez, “Preservation of FUV aluminum reflectance by overcoating with C60 films,” Appl. Opt. 39, 149-156 (2000).