Improvement of hydrogenated microcrystalline silicon solar cell performance by VHF power profiling technique

Solar Energy Materials and Solar Cells

Volumn 94, Issue 2, 2010, Pages 254-257

  Han, Xiaoyan ^a   Hou, Guofu ^a   Zhang, Xiaodan ^a   Wei, Changchun ^a   Li, Guijun ^a   Zhang, Jianjun ^a   Chen, Xinliang ^a   Zhang, Dekun ^a   Sun, Jian ^a   Zhao, Ying ^a   Geng, Xinhua ^a  

^a NANKAI UNIVERSITY   (China)

Author keywords

High rate; Microcrystalline silicon; Power profiling; Solar cell

Indexed keywords

GROWTH DIRECTIONS; GROWTH SURFACES; HIGH CONVERSION EFFICIENCY; HIGH DEPOSITION RATES; HIGH RATE; HIGH-POWER; HYDROGENATED MICROCRYSTALLINE SILICON; INTRINSIC LAYER; MICROMORPH SOLAR CELLS; MICROSTRUCTURE EVOLUTIONS; POWER PROFILING; PRESSURE REGIME; RATE OF CHANGE; SINGLE JUNCTION SOLAR CELLS; SOLAR CELL PERFORMANCE; STEP-BY-STEP; STRUCTURAL EVOLUTION; VERY HIGH FREQUENCY PLASMA; VHF-PECVD;

CELLS; CONVERSION EFFICIENCY; DEPOSITION RATES; HYDROGENATION; ION BOMBARDMENT; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON SOLAR CELLS; SOLAR CELLS;

MICROCRYSTALLINE SILICON;

EID: 72149109284     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2009.09.010     Document Type: Article

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