5-3: [Invited] Roll-to-Roll Manufacturing of electronics on flexible substrates using self-aligned imprint lithography (SAIL)

Proceedings of International Meeting on Information Display

Volumn 8, Issue , 2008, Pages 82-85

  Kim, Han Jun ^a   Marcia, Almanza Workman ^a   Chaiken, Alison ^a   Elder, Richard ^a   Garcia, Bob ^a   Jackson, Warren ^a   Jeans, Albert ^a   Kwon, Ohseung ^a   Luo, Hao ^a   Mei, Ping ^a   Perlov, Craig ^a   Taussig, Carl ^a   Jeffrey, Frank ^b   Beacom, Kelly ^b   Braymen, Steve ^b   Hauschildt, Jason ^b   Larson, Don ^b  

^a HEWLETT PACKARD LABORATORIES   (United States)

^b PowerFilm Inc   (United States)

Author keywords

Flexible substrate; Imprint lithography; Roll to roll; SAIL

Indexed keywords

CURRENT STATUS; FABRICATION TECHNOLOGIES; FLEXIBLE SUBSTRATE; IMPRINT LITHOGRAPHY; LARGE AREA ARRAYS; POLYMER SUBSTRATE; ROLL TO ROLL MANUFACTURING; ROLL-TO-ROLL; SAIL; SELF-ALIGNED; SUBMICRON;

NANOIMPRINT LITHOGRAPHY; THIN FILM TRANSISTORS;

SUBSTRATES;

EID: 65649097584     PISSN: 17387558     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Y. Xia and G. Whitesides, Annual Rev. Matl. Sci. 28,153-184, 1998
2. SR. Quake and A.Scherer, "From micro- to nanofabrication with soft materials", Science, Vol.290, 1536-1540,2000
3. C. Taussig, et al. "On a Roll: Manufacturing of Electronics on Flexible Substrates" 7th Annual Flexible Electronics & Displays Conference, Phoenix, AZ, January 21-24, 2008
4. W. Jackson et al. "Active-Matrix Backplanes Produced by Roll-to-Roll Self-Aligned Imprint Lithography" SID International Symposium, Seminar, and Exhibition, Los Angeles, CA, May 18-23,2008