BGA cutter improvement utilizing nano-TiAlN coating layers synthesized by cathodic arc ion plating process

Surface and Coatings Technology

Volumn 204, Issue 6-7, 2009, Pages 988-991

  Huang, Sung Hsiu ^a   Hsieh, Tsung Eong ^a   Chen, Jia Wei ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b Gigastorage Corporation   (Taiwan)

Author keywords

BGA cutter; Cathodic arc ion plating; Nanocomposite; TEM; TiAlN

Indexed keywords

BGA CUTTER; CATHODIC ARC ION PLATING; CONCENTRATION RATIO; DEPOSITED LAYER; MACHINING SPEED; MAXIMUM HARDNESS; MODULATION WAVELENGTH; OPTIMIZED CONDITIONS; ROTATION SPEED; SI WAFER; TEM; TEM ANALYSIS; TIALN COATINGS; TIALN FILM; WC CERMET;

ALUMINUM; CAVITY RESONATORS; CERMETS; CRYSTAL STRUCTURE; ELECTRIC CURRENTS; HARDNESS; MONOLAYERS; MULTILAYER FILMS; NANOCOMPOSITES; NANOINDENTATION; PLATING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SODIUM CHLORIDE; TRANSMISSION ELECTRON MICROSCOPY;

ION IMPLANTATION;

EID: 71849089849     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.05.014     Document Type: Article

References (16)

1. Vlasveld A.C., Harris S.G., Doyle E.D., Lewis D.B., and Munz W.D. Surf. Coat. Technol. 149 2-3 (2002) 217
2. Ohnuma H., Nihira N., Mitsuo A., Toyoda K., Kubota K., and Aizawa T. Surf. Coat. Technol. 177-178 (2004) 623
3. Takaoka H., Nakamura E., Oshika T., and Nishiyama A. Surf. Coat. Technol. 177-178 (2004) 306
4. Musil J., Kadlec S., Vyskocil J., and Valvoda V. Thin Solid Films 167 (1988) 109
5. Musil J., and Hruby H. Thin Solid Films 365 1-3 (2000) 104
6. Veprek S., Veprak-Heijman M., Karvankova P., and Prochazka J. Thin Solid Films 476 1 (2005) 1
7. Martin P.J., Bendavid A., Cairney J.M., and Hoffman M. Surf. Coat. Technol. 200 7 (2005) 2229
8. Winkelmann A., Cairney J.M., Hoffman M.J., Martin P.J., and Bendavid A. Surf. Coat. Technol. 200 14-15 (2006) 4213
9. Barshilia H.C., Rajam K.S., Jain A., Gopinadhan K., and Chaudhary S. Thin Solid Films 503 1-2 (2006) 158
10. Chang Y.Y., Wang D.Y., and Hung C.Y. Surf. Coat. Technol. 200 5-6 (2005) 1702
11. Chang C.L., Jao J.Y., Ho W.Y., and Wang D.Y. Vacuum 81 (2007) 604
12. Harris S.G., Doyle E.D., Vlasveld A.C., Audy J., Long J.M., and Quick D. Wear 254 (2003) 185
13. Mirkarimi P.B., Hulman L., and Barnett S.A. Appl. Phys. Lett. 57 (1990) 2654
14. Santana A.E., Karimi A., Derflinger V.H., and Schutz A. Tribol. Lett. 17 4 (2004) 689
15. Pharr G.M., and Oliver W.C. MRS Bulletin 17 7 (1992) 28
16. Voevodin A.A., Shtansky D.V., Levashov E.A., and Moore J.J. Nanostructured Thin Films and Nanodispersion Strengthened Coatings (2004), Kluwer Academic Publishers, Netherlands 53