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Volumn , Issue , 2009, Pages 123-124

Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray optics

Author keywords

[No Author keywords available]

Indexed keywords

HIGH RESOLUTION; MICRO ELECTRO MECHANICAL SYSTEM; OPTICAL IMAGE ANALYSIS; PARALLEL LIGHT; RADIUS OF CURVATURE; X RAY TELESCOPE;

EID: 71749112283     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2009.5338574     Document Type: Conference Paper
Times cited : (3)

References (10)
  • 1
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    • T. Ohashi et al, "DIOS: the diffuse intergalactic oxygen surveyor," Proceedings of the SPIE, 6266, 62660G (2006).
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  • 2
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    • See URL
    • See URL: http://ixo.gsfc.nasa.gov/.
  • 3
    • 71749104619 scopus 로고    scopus 로고
    • The Design and Fabrication of a MEMS X-ray Optic using Anisotropic Wet Etching of Si wafers
    • M. Koshiishi et al, "The Design and Fabrication of a MEMS X-ray Optic using Anisotropic Wet Etching of Si wafers," OPTICAL MEMS & NANOPHOTONICS (2006).
    • (2006) OPTICAL MEMS & NANOPHOTONICS
    • Koshiishi, M.1
  • 4
    • 54049094868 scopus 로고    scopus 로고
    • Evaluation of X-ray reflectivity of a MEMS X-ray optic
    • I. Mitsuishi et al, "Evaluation of X-ray reflectivity of a MEMS X-ray optic," OPTICAL MEMS & NANOPHOTONICS (2008).
    • (2008) OPTICAL MEMS & NANOPHOTONICS
    • Mitsuishi, I.1
  • 5
    • 33846196729 scopus 로고    scopus 로고
    • Micro pore X-ray optics using anisotropic wet etching of (110) silicon wafers
    • Y. Ezoe et al. "Micro pore X-ray optics using anisotropic wet etching of (110) silicon wafers," Applied Optics 45, 8932-8938 (2006).
    • (2006) Applied Optics , vol.45 , pp. 8932-8938
    • Ezoe, Y.1
  • 6
    • 44849100559 scopus 로고    scopus 로고
    • Micromachined X-ray collector for space astronomy
    • Y. Ezoe et al, "Micromachined X-ray collector for space astronomy," Sensors&Actuators A, 145-146, 201-206 (2008).
    • (2008) Sensors&Actuators A , vol.145-146 , pp. 201-206
    • Ezoe, Y.1
  • 7
    • 11144324368 scopus 로고    scopus 로고
    • Shaped silicon crystal wafers obtained by plastic deformation and their application to silicon crystal lenses
    • K. Nakajima et al, "Shaped silicon crystal wafers obtained by plastic deformation and their application to silicon crystal lenses," Nature Materials, 4, 47-50 (2005).
    • (2005) Nature Materials , vol.4 , pp. 47-50
    • Nakajima, K.1
  • 8
    • 69949148989 scopus 로고    scopus 로고
    • Development of light-weight & highresolution X-ray pore optics in Japan
    • Y. Ezoe et al, "Development of light-weight & highresolution X-ray pore optics in Japan," in the International workshop on Astronomical X-ray Optics (2008).
    • (2008) International workshop on Astronomical X-ray Optics
    • Ezoe, Y.1
  • 9
    • 69949115915 scopus 로고    scopus 로고
    • Novel ultra-lightweight and high-resolution MEMS X-ray optics
    • I. Mitsuishi et al, "Novel ultra-lightweight and high-resolution MEMS X-ray optics," Proceedings of the SPIE, 7360, 736040 (2009).
    • (2009) Proceedings of the SPIE , vol.7360 , pp. 736040
    • Mitsuishi, I.1
  • 10
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    • Magnetic field assisted finishing of ultralightweight and high-resolution MEMS X-ray micro- pore optics
    • R. Riveros et al, "Magnetic field assisted finishing of ultralightweight and high-resolution MEMS X-ray micro- pore optics," Proceedings of SPIE, 7360, 736040 (2009).
    • (2009) Proceedings of SPIE , vol.7360 , pp. 736040
    • Riveros, R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.