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Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2001, Pages 211-214

Temperature compensation of SAW in ZnO/SiO2/Si structure

(4) Wu, P a Emanetoglu, N W a Tong, X a Lu, Y a

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; ACOUSTIC WAVE VELOCITY; COMPUTER SIMULATION; MATRIX ALGEBRA; MULTILAYERS; SILICA; THERMODYNAMIC STABILITY; VELOCITY; ZINC OXIDE;

ELECTRO-MECHANICAL COUPLING COEFFICIENTS; TEMPERATURE COEFFICIENT OF DELAY; TEMPERATURE COMPENSATION; TRANSFER MATRIX METHOD;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0035732543 PISSN: 10510117 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (32)

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