Temperature stability of ZnO thin film SAW device on fused quartz

IEEE Transactions on Device and Materials Reliability

Volumn 5, Issue 3, 2005, Pages 494-500

  Tomar, Monika ^a,b   Gupta, Vinay ^a,b   Sreenivas, K ^b   Mansingh, Abhai ^c  

^a IEEE   (India)

^b UNIVERSITY OF DELHI   (India)

^c NONE

Author keywords

Deposition by sputtering (81.15.Cd); Filters (84.30.Vn); Surface acoustic waves (SAWs) in piezoelectrics (77.65.Dq); Thermal stability (68.60.Dv)

Indexed keywords

DEPOSITION BY SPUTTERING (81.15.CD); FILTERS (84.30.VN); SURFACE ACOUSTIC WAVES (SAWS) IN PIEZOELECTRICS (77.65.DQ); THERMAL STABILITY (68.60.DV);

ACOUSTIC SURFACE WAVE DEVICES; ELECTROMECHANICAL FILTERS; QUARTZ; RADIO FREQUENCY AMPLIFIERS; SUBSTRATES; ZINC OXIDE;

THIN FILMS;

EID: 29344452711     PISSN: 15304388     EISSN: 15304388     Source Type: Journal    
DOI: 10.1109/TDMR.2005.853453     Document Type: Article

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