Molecular dynamics simulations of nanoimprinting lithography

Langmuir

Volumn 25, Issue 22, 2009, Pages 13244-13249

  Carrillo, Jan Michael Y ^a   Dobrynin, Andrey V ^a  

^a UNIVERSITY OF CONNECTICUT   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COARSE-GRAINED MOLECULAR DYNAMICS SIMULATIONS; ELASTIC ENERGY; LIQUID INTERFACE; MASTER MOLDS; MOLECULAR DYNAMICS SIMULATIONS; NANO-IMPRINTING; NANOIMPRINTING LITHOGRAPHY; NANOMETER SIZE; NEGATIVE IMAGE; POLYMER NETWORKS; POLYMERIC FILMS; RELATIVE DEFORMATION; REPLICATION PROCESS; SHEAR MODULUS; SURFACE ENERGIES; THREE-STEP PROCESS; UNIVERSAL PARAMETERS;

DEFORMATION; INTERFACIAL ENERGY; LIQUIDS; MOLDS; MOLECULAR DYNAMICS; PLASTIC FILMS; SURFACE CHEMISTRY; SURFACE TENSION;

POLYMERS;

EID: 71549165797     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la9019266     Document Type: Article

References (31)

1. Euliss, L. E.; DuPont, J. A.; Gratton, S.; DeSimone, J. Chem. Soc. Rev. 2006, 35, 1095-1104.
2. Lu, Y.; Chen, S. C. Adv. Drug Delivery Rev. 2004, 56(11), 1621-1633.
3. Gadegaard, N.; Mosler, S.; Larsen, N. B. Macromol. Mater. Eng. 2003, 255 (1), 76-83.
4. Bruder, J. M.; Monu, N C.; Harrison, M. W.; Hoffman-Kim, D. Langmuir 2006, 22(20), 8266-8270.
5. Gates, B. D.; Xu, Q. B.; Stewart, M.; Ryan, D.; Willson, C. G.; Whitesides, G. M. Chem. Rev. 2005, 105, 1171-1196.
6. Geissler, M.; Xia, Y. N Adv. Mater. 2004, 16(15), 1249-1269.
7. Chou, S. Y.; Krauss, P. R.; Renstrom, P. J. Appl. Phys. Lett. 1995, 67(21), 3114-3116.
8. Chou, S. Y.; Krauss, P. R.; Renstrom, P. J. Science 1996, 272(5258), 85-87.
9. Guo, L. J. J. Phys. D: Appl. Phys. 2004, 37(11), R123-R141.
10. Bratton, D.; Yang, D.; Dai, J. Y.; Ober, C. K. Polym. Adv. Technol. 2006, 17(2), 94-103.
11. Xia, Y. N.; Whitesides, G. M. Annu. Rev. Mater. Sci. 1998, 25, 153-184.
12. Zhao, X. M.; Xia, Y. N.; Whitesides, G. M. J. Mater. Chem. 1997, 7(7), 1069-1074.
13. Barbero, D. R.; Saifullah, M. S. M.; Hoffmann, P.; Mathieu, H. J.; Anderson, D.; Jones, G. A. C.; Welland, M. E.; Steiner, U. Adv. Fund. Mater. 2007, 17, 2419-2425.
14. Rolland, J. P.; Maynor, B. W.; Euliss, L. E.; Exner, A. E.; Denison, G. M.; DeSimone, J. M. J. Am. Chem. Soc. 2005, 127(28), 10096-10100.
15. Maynor, B. W.; Larue, I.; Hu, Z.; Rolland, J. P.; Pandya, A.; Fu, Q.; Liu, J.; Spontak, R. J.; Sheiko, S. S.; Samulski, R. J.; Samulski, E. T.; DeSimone, J. M. Small 2007, 3(5), 845-849.
16. Yu-Su, S. Y.; Thomas, D. R.; Alford, J. E.; Larue, I.; Pitsikalis, M.; Hadjichristidis, N.; DeSimone, J. M.; Dobrynin, A. V.; Sheiko, S. S. Langmuir 2008, 24(21), 12671-12679.
17. de Gennes, P.-G.; Brochard-Wyart, F.; Quere, D. Capillarity and Wetting Phenomena; Springer: New York, 2002.
18. Lau, A. W. C.; Portigliatti, M.; Raphael, E.; Leger, L. Europhys. Lett. 2002, 60(5), 717-723.
19. Joanny, J.-F.; Johner, A.; Vilgis, T. A. Eur. Phys. J. E 2001, 6, 201-209.
20. Frenkel, D.; Smit, B. Understanding Molecular Simulations; Academic Press: New York, 2002.
21. Plimpton, S.J. J. Comp. Phys. 1995, 117, 1-19. http://lammps.sandia.gov.
22. Grest, G. S.; Putz, M.; Everaers, R.; Kremer, K. J. Non-Cryst. Solids 2000, 274(1-3), 139-146.
23. Rottach, D. R.; Curro, J. G.; Budzien, J.; Grest, G. S.; Svaneborg, C.; Everaers, R. Macromolecules 2007, 40(1), 131-139.
24. Svaneborg, C.; Grest, G. S.; Everaers, R. Polymer 2005, 46(12), 4283-4295.
25. Rottach, D. R.; Curro, J. G.; Budzien, J.; Grest, G. S.; Svaneborg, C.; Everaers, R. Macromolecules 2006, 39(16), 5521-5530.
26. Rubinstein, M.; Colby, R. H. Polymer Physics; Oxford University Press: New York, 2003.
27. MacKintosh, F. C. Elasticity and dynamics of cytoskeletal filaments and their networks. In Soft Condensed Matter Physics in Molecular and Cell Biology; Poon, W. C. K., Andelman, D., Eds.; Taylor & Francis: New York, 2006; pp 139-155.
28. Simmons, V.; Hubbard, J. B. J. Chem. Phys. 2004, 720(6), 2893-2900.
29. Buhn, J. B.; Bopp, P. A.; Hampe, M. J. Fluid Phase Equilib. 2004, 224(2), 221-230.
30. Buhn, J. B.; Bopp, P. A.; Hampe, M. J. J. Mol. Liq. 2006, 125(2-3), 187196.
31. Shull, K. R.; Creton, C. J. Polym. Sci., Part B: Polym. Phys. 2004, 42(22), 4023-4043.