Performance analysis and measurement of micro-machined gyroscope

ICEMI 2009 - Proceedings of 9th International Conference on Electronic Measurement and Instruments

Volumn , Issue , 2009, Pages 130-134

  Liu, Haipeng ^a   Gao, Shiqiao ^a   Liang, Xinjian ^a   Jin, Lei ^a  

^a BEIJING INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Comb capacitive micro gyroscope; Natural frequency; Performance measurement; Quality factor; Vibration characteristics

Indexed keywords

COMB CAPACITIVE MICRO GYROSCOPE; CORIOLIS; DATA ACQUISITION CIRCUIT; DATA STORAGE SYSTEMS; DIRECT CURRENT POWER; DYNAMIC SIGNAL ANALYZERS; HIGH RELIABILITY; LOWER COST; LOWER-POWER CONSUMPTION; MICRO-GYROSCOPE; MICRO-MACHINED GYROSCOPE; PERFORMANCE ANALYSIS; QUALITY FACTORS; RESONANT FREQUENCIES; SMALL SIZE; TESTING RESULTS; VIBRATION CHARACTERISTICS; VIBRATION PROPERTIES;

BANDPASS FILTERS; DATA STORAGE EQUIPMENT; INSTRUMENT TESTING; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT;

GYROSCOPES;

EID: 71549148392     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICEMI.2009.5274868     Document Type: Conference Paper

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