Large-deflection spiral-shaped micromirror actuator

Journal of Microelectromechanical Systems

Volumn 18, Issue 6, 2009, Pages 1357-1364

  Sadat, Seid Hossein ^a   Kamiya, Daiki ^a   Horie, Mikio ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Actuator; Electrode shape; Microelectromechanical systems (MEMS); Micromirror; Optical switch

Indexed keywords

ACTUATION VOLTAGES; ACTUATOR ELECTRODES; ELECTROMECHANICAL MODELS; ENERGY METHOD; FREE-SPACE OPTICAL; INCREASED FLEXIBILITY; MICRO MIRROR; MICROELECTROMECHANICAL SYSTEMS; MICROELECTROMECHANICAL SYSTEMS (MEMS); REFLECTION MEASUREMENTS; ROTATION ANGLES; ROTATIONAL ACTUATION; SELF-ASSEMBLING; SURFACE MICROMACHINING PROCESS; TWO-AXIS;

ACTUATORS; COMPOSITE MICROMECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL SWITCHES;

ELECTROSTATIC ACTUATORS;

EID: 71549125270     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2031700     Document Type: Article

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