Experimental and theoretical studies of the energy-loss straggling of H and He ion beams in HfO2 films

European Physical Journal D

Volumn 54, Issue 1, 2009, Pages 65-70

  Abril, I ^a   Behar, M ^b   Garcia Molina, R ^c   Fadanelli, R C ^b   Nagamine, L C C M ^b   Grande, P L ^b   Schunemann L ^b   Denton, C D ^a   Arista, N R ^d   Saitovitch, E B ^e  

^a UNIVERSITY OF ALICANTE   (Spain)

^b FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^c UNIVERSITY OF MURCIA   (Spain)

^d CENTRO ATÓMICO BARILOCHE   (Argentina)

^e CENTRO BRASILEIRO DE PESQUISAS FÍSICAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DISSIPATION; HAFNIUM OXIDES; ION BEAMS; IONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

DIELECTRIC FORMALISM; ENERGY LOSS FUNCTION; ENERGY LOSS STRAGGLING; LOWER ENERGIES; MEDIUM ENERGY ION SCATTERING; RUTHERFORD BACKSCATTERING TECHNIQUES; THEORETICAL CALCULATIONS; THEORETICAL STUDY;

HELIUM;

EID: 71549122061     PISSN: 14346060     EISSN: 14346079     Source Type: Journal    
DOI: 10.1140/epjd/e2009-00168-7     Document Type: Article

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