MEMS for space

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 17-24

  De Rooij, N F ^a,b   Gautsch, S ^a   Briand, D ^a   Marxer, C ^c   Mileti, G ^d   Noell, W ^a   Shea, H ^a   Staufer, U ^e,g   Van Der Schoot, B ^f  

^a EPFL   (Switzerland)

^b CSEM   (Switzerland)

^c Sercalo Microtechnology Ltd   (Switzerland)

^d UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^e DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^f Seyonic SA   (Switzerland)

^g DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

AFM; Atomic clock; Bioreactor; Cubesat; Mars; MEMS; Micromirror; Micropropulsion; Nano picosatellites; Phoenix; Space; Swisscube

Indexed keywords

AFM; CUBESAT; MEMS MICROMIRROR; MICRO PROPULSION; PICO-SATELLITES;

ACTUATORS; ATOMIC CLOCKS; ATOMIC FORCE MICROSCOPY; BIOREACTORS; FREQUENCY STANDARDS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; NANOSENSORS; PIEZOELECTRIC TRANSDUCERS; RISK PERCEPTION; SATELLITES; SPACE PLATFORMS; SPACE RESEARCH; UNITS OF MEASUREMENT;

SOLID-STATE SENSORS;

EID: 71449123795     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285575     Document Type: Conference Paper

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