Large deformation balloon micro-actuator based on pyrotechnics on chip

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 535-538

  Briand, D ^a   Dubois, P ^b   Bonjour, L E ^b   Guillot, L ^a   Bley, U ^c   Danninger, S ^c   Rosset, S ^b   Shea, H ^b   De Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b EPFL   (Switzerland)

^c RUAG Ammotec GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BALLOONS; COMPOSITE MICROMECHANICS; DEFORMATION; MECHANICAL ENGINEERING; MECHANICAL PROPERTIES; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PETROLEUM ENGINEERING; PROPELLANTS; REACTIVE ION ETCHING; SMOKE; SOLID PROPELLANTS; SPACE RESEARCH; SPACECRAFT PROPULSION; THERMOCHEMISTRY;

DESIGN RULES; ELASTIC MEMBRANES; EXPERIMENTAL DATA; INTERNATIONAL CONFERENCES; LARGE DEFORMATIONS; MICRO ACTUATORS; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROMACHINED CAVITY; ON CHIPS; OUT-OF-PLANE DEFLECTION; SPACE EXPLORATIONS; UNIT OF MASS; VOLUME OF GAS;

COMBUSTION;

EID: 50149117405     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443711     Document Type: Conference Paper

References (5)

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