Flexible dome and bump shape piezoelectric tactile sensors using PVDF-TrFE copolymer

Journal of Microelectromechanical Systems

Volumn 17, Issue 2, 2008, Pages 334-341

  Li, Chunyan ^a   Wu, Pei Ming ^a   Lee, Soohyun ^a   Gorton, Andrew ^a   Schulz, Mark J ^a   Ahn, Chong H ^a  

^a 705 Engineering Research Center   (United States)

Author keywords

Bump shape; Dome shape; Flexible tactile sensor; Mold transfer method; Piezoelectric devices; Polyvinylidenefluoride trifluoroethylene (PVDF TrFE) piezoelectric copolymer

Indexed keywords

BIO-MEDICAL DEVICES; BUMP SHAPE; FABRICATION METHODS; FLEXIBLE TACTILE SENSOR; HIGH SENSITIVITIES; MICROCATHETERS; MINIMALLY INVASIVE; PIEZOELECTRIC POLYMERS; PIEZOELECTRIC SENSORS; POLYMER MICROSTRUCTURES; POLYVINYLIDENEFLUORIDE-TRIFLUOROETHYLENE (PVDF-TRFE) PIEZOELECTRIC COPOLYMER; SENSING COMPONENTS;

COPOLYMERIZATION; DOMES; MANGANESE COMPOUNDS; MICROSTRUCTURE; MOLDS; OPTICAL SENSORS; PIEZOELECTRICITY; POLYMER FILMS; POLYMERS;

PIEZOELECTRIC TRANSDUCERS;

EID: 64649083401     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.911375     Document Type: Article

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