Pneumatic two-dimensional conveyance system for autonomous distributed MEMS

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1019-1022

  Fukuta, Y ^a   Mita, Y ^a   Arai, M ^a   Fujita, H ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

CMOS integrated circuits; CMOS process; Control systems; Electrostatic actuators; Fabrication; Force sensors; Microactuators; Micromachining; Micromechanical devices; Sensor arrays

Indexed keywords

ACTUATORS; AIR; CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; CONTROL SYSTEMS; ELECTROSTATIC ACTUATORS; ELECTROSTATIC DEVICES; ELECTROSTATICS; FABRICATION; INTEGRATED CIRCUITS; MICROACTUATORS; MICROMACHINING; MICROOPTICS; MICROSYSTEMS; PROCESS CONTROL; SENSOR ARRAYS; TRANSDUCERS;

BULK MICROMACHINING TECHNOLOGY; CMOS PROCESSS; CONTROLLING METHODS; DISTRIBUTED PROCESSING SYSTEMS; FORCE SENSOR; MICRO CONVEYANCE SYSTEM; MICROMECHANICAL DEVICE; TWO-DIMENSIONAL SYSTEMS;

SOLID-STATE SENSORS;

EID: 84944731543     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1216941     Document Type: Conference Paper

References (8)

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