Micro tactile sesors with a suspeded and oriented single walled carbon nanotube beam embeded in PDMS elastomer

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 457-460

  Lu, M ^a   Lee, D ^a   Yeom, T ^a   Cui, T ^a  

^a University of Minnesota   (United States)

Author keywords

Carbon nanotube; PDMS; Tactile sensor

Indexed keywords

DC RESISTANCE; DIELECTROPHORESIS; LOW-TEMPERATURE FABRICATION; MICRO FLUIDIC SYSTEM; NANOINDENTATION TESTS; OXYGEN PLASMA ETCHING; PDMS; PDMS ELASTOMER; PIEZO-RESISTIVE; SELF-ASSEMBLED; SENSING ELEMENTS; TACTILE SENSORS;

ACTUATORS; CARBON NANOTUBES; ELECTROPHORESIS; EMBEDDED SYSTEMS; MICROCHANNELS; MICROSYSTEMS; OXYGEN; PIEZOELECTRIC TRANSDUCERS; PLASMA ETCHING; SENSOR ARRAYS; SILICONES; SINGLE-WALLED CARBON NANOTUBES (SWCN);

SOLID-STATE SENSORS;

EID: 71449110317     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285465     Document Type: Conference Paper

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