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Volumn , Issue , 2009, Pages 2034-2037

Micro-particle filter made in SU-8 for biomedical applications

Author keywords

Cantilever; Filter; Microfluidic system; SU 8

Indexed keywords

BIOMEDICAL APPLICATIONS; CAPTURED PARTICLES; FLOW RESISTANCE; MICRO FLUIDIC SYSTEM; MICRO-PARTICLES; PARTICLE FILTER; POLYMER CANTILEVERS; POLYSTYRENE BEADS;

EID: 71449100324     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285663     Document Type: Conference Paper
Times cited : (5)

References (7)
  • 2
    • 0029181114 scopus 로고
    • Micro filtration Membrane Sieve with Silicon Micro Machining for Industrial and Biomedical Applications
    • C.J.M. van Rijn, M.C. Elwenspoek, "Micro filtration Membrane Sieve with Silicon Micro Machining for Industrial and Biomedical Applications", Proceedings IEEE Micro Electro Mechanical Systems, pp. 83-87, 1995
    • (1995) Proceedings IEEE Micro Electro Mechanical Systems , pp. 83-87
    • van Rijn, C.J.M.1    Elwenspoek, M.C.2
  • 5
    • 37149022569 scopus 로고    scopus 로고
    • Optimized plasma-deposited fluorocarbon coating for dry release and passivation of thin SU-8 cantilevers
    • S. Keller, D. Haefliger, A. Boisen, "Optimized plasma-deposited fluorocarbon coating for dry release and passivation of thin SU-8 cantilevers", J. Vac. Sci. Technol. B, vol. 25 (6), pp. 1903-1908
    • J. Vac. Sci. Technol. B , vol.25 , Issue.6 , pp. 1903-1908
    • Keller, S.1    Haefliger, D.2    Boisen, A.3
  • 7
    • 0042040751 scopus 로고    scopus 로고
    • CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems
    • H. Klang, J.P. Kutter, O. Geschke, "CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems", Lab on a chip, vol. 2(4), pp. 242-246, 2002
    • (2002) Lab on a chip , vol.2 , Issue.4 , pp. 242-246
    • Klang, H.1    Kutter, J.P.2    Geschke, O.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.