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Volumn , Issue , 2009, Pages 2034-2037
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Micro-particle filter made in SU-8 for biomedical applications
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Author keywords
Cantilever; Filter; Microfluidic system; SU 8
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Indexed keywords
BIOMEDICAL APPLICATIONS;
CAPTURED PARTICLES;
FLOW RESISTANCE;
MICRO FLUIDIC SYSTEM;
MICRO-PARTICLES;
PARTICLE FILTER;
POLYMER CANTILEVERS;
POLYSTYRENE BEADS;
ACTUATORS;
AIR FILTERS;
ATOMIC FORCE MICROSCOPY;
FLUIDIC DEVICES;
MICROFLUIDICS;
MICROSYSTEMS;
NANOCANTILEVERS;
NONLINEAR FILTERING;
PIEZOELECTRIC TRANSDUCERS;
POLYSTYRENES;
PORE SIZE;
SOLID-STATE SENSORS;
PHOTORESISTS;
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EID: 71449100324
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2009.5285663 Document Type: Conference Paper |
Times cited : (5)
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References (7)
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