Assembly-free 3-D microfabrication process using single-mask multidirectional photolithography

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1900-1903

  Suzuki, T ^a   Yamamoto, H ^b   Kanno, I ^b   Washizu, M ^c,d   Kotera, H ^b,d  

^a KAGAWA UNIVERSITY   (Japan)

^b KYOTO UNIVERSITY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

^d JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Assembly; Microchannel; Photolithography

Indexed keywords

3D MICRO-FABRICATION; ASSEMBLING PROCESS; EMBEDDED MICROCHANNELS; FREE PATH; MICRO-FABRICATION TECHNIQUES; MICROFLUIDIC NETWORKS; MULTI-DIRECTIONAL; SHORT PERIODS; SINGLE-MASK; UV LITHOGRAPHY;

ACTUATORS; MICROANALYSIS; MICROCHANNELS; MICROFABRICATION; MICROMACHINING; MICROSYSTEMS; MILITARY PHOTOGRAPHY; PHOTOLITHOGRAPHY; PIEZOELECTRIC TRANSDUCERS; THREE DIMENSIONAL;

SOLID-STATE SENSORS;

EID: 71449098029     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285689     Document Type: Conference Paper

References (5)

1. H. Sato, T. Kakinuma, J. S. Go and S. Shoji, "In-channel 3-D micromesh structures using maskless multi-angle exposures and their microfilter application", Sens. Actuators A, Vol.111, pp.87-92, 2004.
2. M. Han, W. Lee, S. K. Lee, and S. S. Lee, "3D microfabrication with inclined/rotated UV lithography", Sens. Actuators A, Vol.111, pp.14-20, 2004.
3. J. Kim, M.G. Allen and Y.K. Yoon, "Automated Dynamic Mode Multidirectional UV Lithography for Complex 3-D Microstructures", Proc. MEMS2008, pp.399-402, 2008.
4. T. Suzuki, et. al, "High throughput cell electroporation array fabricated by single-mask inclined UV lithography exposure and oxygen plasma etching", Proc. Transducers'07, pp. 687-690, 2007.
5. T. Suzuki, H. Yamamoto, M. Ohoka, I. Kanno, M. Washizu and H. Kotera, "A Low-Damage Cell Trapping Array Fabricated by Single-mask Multidirectional Photolithography with Equivalent Circuit Analysis", Proc. of μTAS 2007, pp.1765-1767, 2007.