High throughput cell electroporation array fabricated by single-mask inclined UV lithography exposure and oxygen plasma etching

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 687-690

  Suzuki, Takaaki ^a,b   Yamamoto, Hideo ^a   Ohoka, Masataka ^c   Okonogi, Atsuhito ^a   Kabata, Hiroyuki ^a   Kanno, Isaku ^a   Washizu, Masao ^d   Kotera, Hidetoshi ^a,b  

^a KYOTO UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c Sakyo 606   (Japan)

^d UNIVERSITY OF TOKYO   (Japan)

Author keywords

And oxygen plasma etching; Electroporation; Inclined lithography

Indexed keywords

ACTUATORS; ELECTRON BEAM LITHOGRAPHY; MICROSYSTEMS; NONMETALS; OPTICAL DESIGN; ORIFICES; OXYGEN; PLASMA ETCHING; PLASMAS; SENSORS; THROUGHPUT; TRANSDUCERS;

AND OXYGEN PLASMA ETCHING; CELL ELECTROPORATION; CELL TREATMENT; ELECTROPORATION; EMBEDDED NETWORKS; HIGH THROUGHPUTS; HIGH-DENSITY; INCLINED LITHOGRAPHY; INTERNATIONAL CONFERENCES; LIVING CELLS; MICRO CHANNELS; MICRO-ORIFICES; OXYGEN PLASMA ETCHING; SOLID-STATE SENSORS; UV-LITHOGRAPHY;

ETCHING;

EID: 50049132616     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300223     Document Type: Conference Paper

References (7)

1. C. Yi, C.W. Li, S. Ji and M. Yang, "Microfluidics technology for manipulation and analysis of biological cells", Analytica Chimica Acta, Vol.560, (2006) pp.1-23.
2. Y. Huang and B. Rubinsky, "Flow-through micro-electroporation chip for high efficiency single-cell genetic manipulation", Sens. Actuators A, Vol.104, (2003) pp.205-212.
3. M. Khine, A. Kau, C. Ionescu-Zanetti, J. Seo and L. P. Lee, "A Single Cell Electroporation Chip", Lab on a Chip, Vol.5, (2005) pp.38-43.
4. T. Suzuki, T. Tokuda, H. Yamamoto, M. Ohoka, I. Kanno, M. Washizu and H. Kotera, "Rapid Fabrication Process for High Aspect-Ratio Embedded Microchannels with Orifices Using a Single SU-8 Layer on a Mask", Proc. MEMS 2006, pp.346-349.
5. T. Suzuki, T. Tokuda, H. Yamamoto, M. Ohoka, I. Kanno, M. Washizu and H. Kotera, "Rapid Fabrication Process for High Aspect-Ratio Embedded Microchannels with Orifices Using a Single SU-8 Layer on a Mask", Proc. MEMS 2006, pp.346-349.
6. H. Sato, T. Kakinuma, J. S. Go and S. Shoji, "In-channel 3-D Micromesh Structures Using Maskless Multi-angle Exposures and Their Microfilter Application", Sens. Actuators A, Vol.111, (2004) pp.87-92.
7. M. Han, W. Lee, S. K. Lee, and S. S. Lee, "3D Microfabrication with Inclined/Rotated UV Lithography", Sens. Actuators A, Vol.111, (2004) pp.14-20.