CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1646-1649

  Velasquez Garcia L F ^a   Gassend, B ^b   Akinwande, A I ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b EXPONENT INC   (United States)

Author keywords

3D MEMS packaging; Carbon nanotubes (CNTs); DRIE; Electron impact ionization; Field emission; Gas ionizer; Portable mass spectrometry

Indexed keywords

3-D MEMS; 3D MEMS PACKAGING; DRIE; ELECTRON IMPACT-IONIZATION; GAS IONIZERS; PORTABLE MASS SPECTROMETRY;

ACTUATORS; ARGON; ASPECT RATIO; CARBON NANOTUBES; ELECTRON EMISSION; ELECTRONS; FIELD EMISSION; IONIZATION OF GASES; LEAKAGE (FLUID); MASS SPECTROMETERS; MASS SPECTROMETRY; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PARTICLE DETECTORS; PIEZOELECTRIC TRANSDUCERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SOLID-STATE SENSORS; THREE DIMENSIONAL;

IMPACT IONIZATION;

EID: 71449093254     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285776     Document Type: Conference Paper

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