A PECVD CNT-based open architecture field ionizer for portable mass spectrometry

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 742-745

  Velasquez Garcia L F ^a   Akinwande, A I ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; CHLORINE COMPOUNDS; COMPOSITE MICROMECHANICS; ELECTRON BEAM LITHOGRAPHY; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; MASS SPECTROMETRY; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; NONMETALS; OPTICAL DESIGN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON;

CARBON NANOTUBE; CHEMICAL VAPORS; DEEP-REACTIVE ION ETCHING; ELECTRICAL TESTING; ELECTRON FIELD EMITTERS; INTERNATIONAL CONFERENCES; ION CURRENTS; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-GAS; OPEN ARCHITECTURE; PARTICLE FLUXES; SILICON STRUCTURES; SPARSE ARRAYS;

REACTIVE ION ETCHING;

EID: 50149111359     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443763     Document Type: Conference Paper

References (11)

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