Analysis of alignment modeling for Nikon steppers

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn , Issue , 2009, Pages 356-359

  He, Feng ^a   Wang, Jun ^a   Wu, Zhiming ^a   Jiang, Yadong ^a   Yuan, Kai ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT ACCURACY; ALIGNMENT ERROR; ALIGNMENT SYSTEM; DIFFERENT PROCESS; KEY COMPONENT;

ALIGNMENT; DEFORMATION; ERRORS; INTEGRATED CIRCUITS; MATHEMATICAL MODELS; OPTICAL SYSTEMS; QUALITY ASSURANCE; SAFETY FACTOR;

FAILURE ANALYSIS;

EID: 71049162227     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IPFA.2009.5232634     Document Type: Conference Paper

References (11)

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