Effects of oxygen addition on the local structures of cosputtered transparent conducting oxide films

Journal of Physical Chemistry C

Volumn 113, Issue 47, 2009, Pages 20463-20466

  Cho, Deok Yong ^a   Song, Jaewon ^b   Hwang, Cheol Seong ^b  

^a Sungkyunkwan University   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS OXIDE FILMS; CO-SPUTTERED FILMS; CO-SPUTTERING METHOD; CRYSTALLINITIES; HARD X RAY; LOCAL STRUCTURE; OXYGEN ADDITION; OXYGEN GAS; PHASE CHANGE; RF-MAGNETRON SPUTTERING; TRANSPARENT CONDUCTING OXIDE FILMS; ZNO;

ABSORPTION SPECTROSCOPY; AMORPHOUS FILMS; CONDUCTIVE FILMS; GAS ABSORPTION; MAGNETRON SPUTTERING; OXYGEN; PHOTODEGRADATION; PLASMAS; SEMICONDUCTING ZINC COMPOUNDS; ZINC; ZINC OXIDE;

OXIDE FILMS;

EID: 71049118902     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp905980q     Document Type: Article

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