Cr-doped DLC films in three mid-frequency dual-magnetron power modes

Surface and Coatings Technology

Volumn 200, Issue 24, 2006, Pages 6765-6769

  Xiang, Yu ^a   Cheng biao, Wang ^a   Yang, Liu ^b   De yang, Yu ^b   Zhi qiang, Fu ^a  

^a CHINA UNIVERSITY OF GEOSCIENCES   (China)

^b Beijing Powertech Co Ltd   (China)

Author keywords

Cr doped DLC films; Mid frequency dual magnetron sputtering; Properties; Waveforms

Indexed keywords

ADHESION; CHROMIUM; INDENTATION; MAGNETRON SPUTTERING; MICROHARDNESS; MORPHOLOGY; SEMICONDUCTOR DOPING;

BALL-ON-DISC TESTING; NANOINDENTATION; SCRATCH ADHESION TESTING;

DIAMOND LIKE CARBON FILMS;

ADHESION; CHROMIUM; DIAMOND LIKE CARBON FILMS; INDENTATION; MAGNETRON SPUTTERING; MICROHARDNESS; MORPHOLOGY; SEMICONDUCTOR DOPING;

EID: 33745005734     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.10.018     Document Type: Article

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