Observation of kinoform-style multilayer Fresnel zone plate by scanning ion microscopy

Vacuum

Volumn 84, Issue 5, 2009, Pages 669-671

  Yasumoto, Masato ^a,c   Tamura, Shigeharu ^a,c   Kamijo, Nagao ^b,c   Uesugi, Kentaro ^c   Takeuchi, Akihisa ^c   Suzuki, Yoshio ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b KANSAI MEDICAL UNIVERSITY   (Japan)

^c JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

Author keywords

Fresnel zone plate; Grain; Hard X ray; Multilayer; Optical element; Thin film

Indexed keywords

COMPOSITE LAYER; FRESNEL ZONE PLATE; GRAIN ORIENTATION; HARD X RAY; HARD-X-RAY FOCUSING; KINOFORM; OPTICAL ELEMENTS; SCANNING ION MICROSCOPY;

FILM PREPARATION; FOCUSED ION BEAMS; ION MICROSCOPES; IONS; MULTILAYERS; OPTICAL DEVICES; OPTICAL INSTRUMENTS; THIN FILM DEVICES;

OPTICAL MULTILAYERS;

EID: 70649100164     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.06.043     Document Type: Article

References (13)

1. Yumoto H., Mimura H., Matsuyama S., Hara H., Yamamura K., Sano Y., et al. Rev Sci Instrum 76 (2005) 063708
2. Maser J., Stephenson G.B., Vogt S., Yun W., Macrander A., Kang H.C., et al. Proc SPIE 5539 (2004) 185
3. Rudolph D., Niemann B., and Schmahl G. Proc SPIE 316 (1981) 103
4. Kamijo N, Suzuki Y, Tamura S, Takeuchi A, Yasumoto M. IPAP conf. series 7. In: Proc. 8th conf. X-ray microscopy; 2006. p. 97-9.
5. Tamura S, Yasumoto M, Kamijo N, Awaji M, Takeuchi A, Uesugi K, et al. IPAP conf. series 7. In: Proc. 8th conf. X-ray microscopy; 2006. p. 107-9.
6. Tamura S., Yasumoto M., Kamijo N., Suzuki Y., Awaji M., Takeuchi A., et al. Vacuum 80 (2006) 823-827
7. Di Fabrizio E., Gentili M., Grella L., Baciocchi M., Krasnoperova A., Cerrina F., et al. J Vac Sci Technol B 12 (1994) 3979-3985
8. Di Fabrizio E., Romanato F., Gentili M., Cabrini S., Kaulich B., Susini J., et al. Nature 401 (1999) 895-898
9. Gupta J., Harper J.M.E., Mauer IV J.L., Blauner P.G., and Smith D.A. Appl Phys Lett 61 (1992) 663-665
10. Levi-Setti R., Fox T.R., and Lim K. Nucl Instrum Methods 205 (1983) 299-309
11. Inkson B.J., Steer T., Mobus G., and Wagner T. J Microsc 201 (2001) 256-269
12. Giannuzzi L.A., and Stevie F.A. Micron 30 (1999) 197-204
13. Sakai Y., Yamada T., Suzuki T., Sato T., Itoh H., and Ichinokawa T. Appl Phys Lett 73 (1998) 611-613