GIXRF in the soft X-ray range used for the characterization of ultra shallow junctions

AIP Conference Proceedings

Volumn 1173, Issue , 2009, Pages 29-33

  Beckhoff, B ^a   Hoenicke, P ^a   Giubertoni, D ^b   Pepponi, G ^b   Bersani, M ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b FONDAZIONE BRUNO KESSLER   (Italy)

Author keywords

Arsenic; Boron; Grazing incidence X ray fluorescence analysis; Ultra shallow junctions

Indexed keywords

EID: 70450284614     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3251239     Document Type: Conference Paper

References (9)

1. W. Vandervorst, T. Janssens, R. Loo, M. Caymax, I. Peytier, R. Lindsay, J. Fruhauf, A. Bergmaier, G. Dollinger, Appl. Surf. Sci. 203-204 371-376 (2003).
2. F. Senf, U. Flechsig, F. Eggenstein, W. Gudat, R. Klein, H. Rabus, G. Ulm, J. Synchrotron Rad. 5, No. 3, 780-782 (1998).
3. B. Beckhoff, R. Fliegauf, M. Kolbe, M. Miiller, J. Weser, G. Ulm, Anal. Chem. 79 7873-7882 (2007).
4. M. Müller, B. Beckhoff, B. Kanngießer, G. Ulm, Phys. Rev. A 74 012702 (2006).
5. M. Bersani, D. Giubertoni, E. Iacob, M. Barozzi, S. Pederzoli, L. Vanzetti, M. Anderle, Appl. Surf. Sci. 252 7315 (2006).
6. D. Giubertoni, M. Bersani, M. Barozzi, S. Pederzoli, E. Iacob, J. A. v. d. Berg, M. Werner, Appl. Surf. Sci. 252 7214 (2006).
7. SRIM 2008 Software Package, http://www.srim.org
8. D. Windt, Computers in Physics 12, 360 (1998).
9. A. Nutsch, B. Beckhoff, R. Altmann, JA. v. d. Berg, D. Giubertoni, P. Hoenicke, M. Bersani, A. Leibold, F. Meirer, M. Müller, G. Pepponi, M. Otto, P. Petrik, M. Reading, L. Pfitzner, H. Ryssel, Solid State Phen. 145-146 97-100 (2009).