Frequency scalable model for MEMS capacitive shunt switches at millimeter-wave frequencies

IEEE Transactions on Microwave Theory and Techniques

Volumn 57, Issue 11, 2009, Pages 2824-2833

  Puyal, Vincent ^a,b   Dragomirescu, Daniela ^a,b   Villeneuve, Christina ^a,b   Ruan, Jinyu ^a,b   Pons, Patrick ^a,b   Plana, Robert ^a,b  

^a LAAS CNRS   (France)

^b INSA   (France)

Author keywords

Capacitive; Modeling; Phase shifters; RF microelectromechanical systems (MEMS); Shunt switches

Indexed keywords

CAPACITIVE SHUNT SWITCH; EQUIVALENT-CIRCUIT MODEL; MEASUREMENT RESULTS; MILLIMETER WAVE FREQUENCIES; PHASE SHIFTER CIRCUIT; RF MICROELECTROMECHANICAL SYSTEMS; RF-MEMS SWITCHES; SCALABLE MODEL; SCALING RULES; SHUNT SWITCH;

ANTENNA PHASED ARRAYS; BICMOS TECHNOLOGY; ELECTRIC SWITCHES; INTEGRATED CIRCUIT MANUFACTURE; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; PHASE SHIFT; PHASE SHIFTERS; SIMULATORS;

COMPOSITE MICROMECHANICS;

EID: 70450277386     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2009.2032473     Document Type: Article

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