High quality medium power RF-MEMS based impedance tuner for smart microsystem integration

Proceedings of the 2007 Ph.D Research in Microelectronics and Electronics conference, PRIME 2007

Volumn , Issue , 2007, Pages 65-68

  Bordas, Chloé ^a   Grenier, Katia ^a   Dubuc, David ^a   Paillard, Mathieu ^b   Cazaux, Jean Louis ^b  

^a UNIVERSITÉ DE TOULOUSE   (France)

^b THALES ALENIA SPACE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT QUALITY; HIGH QUALITY (HQ); IMPEDANCE TUNERS; LARGE DISPERSION; LOW LOSSES; MICRO SYSTEMS; RF-MEMS;

COMPOSITE MICROMECHANICS; ELECTRIC CURRENTS; ELECTRONICS INDUSTRY; ENERGY STORAGE; MEMS; MICROELECTRONICS; OPTICAL DESIGN; POWER AMPLIFIERS; POWER QUALITY; TUNERS;

MICROELECTROMECHANICAL DEVICES;

EID: 47349108809     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RME.2007.4401812     Document Type: Conference Paper

References (6)

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2. th European microwave conference, 2005.
3. T. Vähä-Heikkilä, G. M. Rebeiz, "A 4-18 GHz reconfigurable RF MEMS matching network for power amplifier applications'",Int. Journal RF microwave Computer aided Engineering, April, 2005.
4. Y. Lu, L. P.B. Katehi, D. Peroulis, "High-power MEMS varactors and impedance tuners for millimetrewave applications", IEEE Trans. Microwave. Theory Tech., Vol. 53, Nov 2005, pp3672-3678.
5. T. Vähä-Heikkilä, J. Varis, J. Tuovinen, G. M. Rebeiz, "A reconfigurable 6-20 GHz RF MEMS impedance tuner", IEEE MTT-S Digest, 2004.
6. C. Bordas, K. Grenier, D. Dubuc, M. Paillard, J-L. Cazaux, R. Plana, "Performances optimization of capacitive parallel MEMS switches", APMC 2006.