Self-patterning of a polydimethylsiloxane microlens array on functionalized substrates and characterization by digital holography

Journal of Micromechanics and Microengineering

Volumn 19, Issue 12, 2009, Pages

  Merola, F ^a,b   Paturzo, M ^a   Coppola, S ^a   Vespini, V ^a   Ferraro, P ^a  

^a ISTITUTO NAZIONALE DI OTTICA   (Italy)

^b UNIVERSITY OF NAPLES FEDERICO II   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

A-THERMAL; CRYSTAL SUBSTRATES; DIGITAL HOLOGRAPHY; ELECTRO WETTING; EXPERIMENTAL PROCEDURE; FOCAL LENGTHS; FUNCTIONALIZED; FUNCTIONALIZED SUBSTRATES; MICRO-LENS; MICRO-LENS ARRAYS; MICROSCOPE INTERFERENCE; PERIODICALLY POLED; POLAR DIELECTRICS; POLYDIMETHYLSILOXANE PDMS; THIN LIQUIDS;

COMPUTER GENERATED HOLOGRAPHY; FERROELECTRICITY; FUNCTIONAL POLYMERS; HOLOGRAPHIC INTERFEROMETRY; LIQUID CRYSTAL POLYMERS; MICROLENSES; MICROOPTICS; OPTICAL INSTRUMENT LENSES; SILICONES;

SUBSTRATES;

EID: 70450171049     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/12/125006     Document Type: Article

References (25)

1. Grilli S, Miccio L, Vespini V, Finizio A, De Nicola S and Ferraro P 2008 Liquid micro-lens array activated by selective electrowetting on lithium niobate substrates Opt. Express 16 8084
2. Ruffieux P, Scharf T, Philipoussis I, Herzig H P, Voelkel R and Weible K J 2008 Two step process for the fabrication of diffraction limited concave microlens arrays Opt. Express 16 19541
3. Chang S and Yoon J 2004 Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method Opt. Express 12 6366
4. Wen T T and Hocheng H 2009 Innovative rapid replication of microlens arrays using electromagnetic force-assisted UV imprinting J. Micromech. Microeng. 19 025012
5. Hong K S, Wang J, Sharonov A, Chandra D, Aizenberg J and Yang S 2006 Tunable microfluidic optical devices with an integrated microlens array J. Micromech. Microeng. 16 1660
6. Ren H and Wu S T 2008 Tunable-focus liquid microlens array using dielectrophoretic effect Opt. Express 16 2646
7. Choi Y, Kim H R, Lee K H, Lee Y M and Kim J H 2007 A liquid crystalline polymer microlens array with tunable focal intensity by the polarization control of a liquid crystal layer Appl. Phys. Lett. 91 221113
8. Xiong G R, Han Y H, Sun C, Sun L G, Han G Z and Gu Z Z 2008 Liquid microlens with tunable focal length and light transmission Appl. Phys. Lett. 92 241119
9. Huang X, Cheng C M, Wang L, Wang B, Su C C, Ho M S, LeDuc P R and Lin Q 2008 Thermally tunable polymer microlenses Appl. Phys. Lett. 92 251904
10. Dai H T, Liu Y J, Sun X W and Luo D 2009 A negative-positive tunable liquid-crystal microlens array by printing Opt. Express 17 4317
11. Ferraro P, Grilli S, Miccio L and Vespini V 2008 Wettability patterning of lithium niobate substrate by modulating pyroelectric effect to form microarray of sessile droplets Appl. Phys. Lett. 92 213107
12. Ding Z and Ziaie B 2009 A pH-tunable hydrogel microlens array with temperature-actuated light-switching capability Appl. Phys. Lett. 94 081111
13. Huang P H, Huang T C, Sun Y T and Yang S Y 2008 Fabrication of large area resin microlens arrays using gas-assisted ultraviolet embossing Opt. Express 16 3041
14. Lin T H, Yang H and Chao C K 2006 Concave microlens array mold fabrication in photoresist using UV proximity printing DTIP of MEMS & MOEMS (Stresa, Italy, 26-8 April 2006)
15. Chang C Y, Yang S Y, Huang L S and Jeng T M 2006 A novel method for rapid fabrication of microlens arrays using micro-transfer molding with soft mold J. Micromech. Microeng. 16 999
16. Shih T K, Ho J R and Cheng J W J 2004 A new approach to polymeric microlens array fabrication using soft replica molding IEEE Photonics Technol. Lett. 16 2078
17. Shih T K, Chen C F, Ho J R and Chuang F T 2006 Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding Microelectron. Eng. 83 2499
18. Zhao Y, Yoon Y K, Choi S O, Wu X, Liu Z and Allen M G 2009 Three dimensional metal pattern transfer for replica molded microstructures Appl. Phys. Lett. 94 023301
19. Chan E P and Crosby A J 2006 Fabricating microlens arrays by surface wrinkling Adv. Mater. 18 3238
20. Tong J, Simmons C A and Sun Y 2008 Precision patterning of PDMS membranes and applications J. Micromech. Microeng. 18 037004
21. Chang C Y, Yang S Y, Huang L S and Hsieh K H 2006 Fabrication of polymer microlens arrays using capillary forming with a soft mold of micro-holes array and UV-curable polymer Opt. Express 14 6253
22. Lee S Y, Tung H W, Chen W C and Fang W 2006 Thermal actuated solid tunable lens IEEE Photonics Technol. Lett. 18 2191
23. Chandra D, Yanga S and Lin P C 2007 Strain responsive concave and convex microlens arrays Appl. Phys. Lett. 91 251912
24. Grilli S, Vespini V and Ferraro P 2008 Surface-charge lithography for direct PDMS micro-patterning Langmuir 24 13262
25. Grilli S, Ferraro P, De Nicola S, Finizio A, Pierattini G and Meucci R 2001 Whole optical wavefields reconstruction by digital holography Opt. Express 9 294