Preparation of ultrathin PZT films by a chemical solution deposition method from a polymeric citrate precursor

Journal of the European Ceramic Society

Volumn 30, Issue 2, 2010, Pages 485-488

  Vojisavljević, Katarina ^a   Branković, Goran ^a   Srećković, Tatjana ^a   Rečnik, Aleksander ^b   Branković, Zorica ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Electron microscopy; Films; Precursors organic; PZT

Indexed keywords

AFM; AMORPHOUS SILICA; ANNEALING TIME; CHEMICAL SOLUTION DEPOSITION METHOD; CITRATE PRECURSOR; COMPOSITIONAL VARIATION; ELECTRON ENERGIES; GRAZING-INCIDENCE X-RAY DIFFRACTION; HIGH TEMPERATURE; MICROSTRUCTURAL INSTABILITY; POLYCRYSTALLINE STRUCTURE; PRECURSORS-ORGANIC; PZT; PZT FILM; SI(1 0 0); SPHERICAL CRYSTALLITES; THICK LAYERS; ULTRA-THIN;

AMORPHOUS MATERIALS; AMORPHOUS SILICON; ANNEALING; CHEMICALS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; POLYMERS; SEMICONDUCTING LEAD COMPOUNDS; SILICA; SUBSTRATES; ULTRATHIN FILMS;

FILM PREPARATION;

EID: 70449519170     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2009.07.023     Document Type: Article

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