Electron-beam-induced potentials in semiconductors: Calculation and measurement with an SEM/SPM hybrid system

Journal of Physics D: Applied Physics

Volumn 37, Issue 20, 2004, Pages 2785-2794

  Thomas, Ch ^a   Joachimsthaler, I ^a   Heiderhoff, R ^a   Balk, L J ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRON BEAMS; FERMI LEVEL; MICROSCOPES; SCANNING ELECTRON MICROSCOPY;

HYBRID SYSTEMS; QUASI-FERMI ENERGIES; SCANNING PROBE MICROSCOPES (SPM); SEMICONDUCTOR EQUATIONS;

SEMICONDUCTOR MATERIALS;

EID: 7044241358     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/20/003     Document Type: Article

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