Nanoscopic EBIC technique in a hybrid SEM/SFM system

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1996, Pages 366-369

  Heiderhoff, R ^a   Cramer, R M ^a   Balk, L J ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMONDS; LEAKAGE CURRENTS; MORPHOLOGY; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SCHOTTKY BARRIER DIODES; SEMICONDUCTOR DEVICE MODELS;

HIGH RESOLUTION ELECTRON BEAM INDUCED CURRENT ANALYSIS; POLYCRYSTALLINE DIAMOND; SCANNING FORCE MICROSCOPE;

FAILURE ANALYSIS;

EID: 0029712176     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/relphy.1996.492144     Document Type: Conference Paper

References (7)