Effect of cathodic arc PVD parameters on roughness of TiN coating on steel substrate

Current Applied Physics

Volumn 10, Issue 2, 2010, Pages 471-474

  Ali, M ^a   Hamzah, E ^b   Qazi, I A ^c   Toff, M R M ^d  

^a COMSATS Institute of Information Technology ^*  (Pakistan)

^b UNIVERSITI TEKNOLOGI MALAYSIA   (Malaysia)

^c NATIONAL UNIVERSITY OF SCIENCES AND TECHNOLOGY   (Pakistan)

^d Advanced Materials Research Centre AMREC   (Malaysia)

Author keywords

Macro droplets; Process parameters; Surface roughness; TiN

Indexed keywords

CATHODIC ARC; CHROMIUM IONS; COATING THICKNESS; GROWTH DEFECTS; NITROGEN FLOW RATES; PROCESS PARAMETERS; SAMPLE PREPARATION; STEEL SUBSTRATE; SUBSTRATE BIAS; TIN COATING; TITANIUM ION;

CHROMIUM; DROP FORMATION; ETCHING; HARD COATINGS; METAL ANALYSIS; METAL IONS; PHYSICAL VAPOR DEPOSITION; SURFACE PROPERTIES; SURFACE ROUGHNESS; SURFACE TESTING; THICKNESS MEASUREMENT; TITANIUM; TITANIUM NITRIDE; TOOL STEEL;

SURFACE DEFECTS;

EID: 70350710183     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2009.07.007     Document Type: Article

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