SCOPUS 정보 검색 플랫폼

Volumn 474, Issue 1-2, 2008, Pages 236-242

Study of macrodroplet and growth mechanisms with and without ion etchings on the properties of TiN coatings deposited on HSS using cathodic arc physical vapour deposition technique

(3) Mubarak, A a Hamzah, E a Toff, M R M b

a UNIVERSITI TEKNOLOGI MALAYSIA (Malaysia)

b SIRIM Berhad (Malaysia)

Author keywords

Cathodic arc; Hardness; Ion etching; Surface morphology; Titanium nitride

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; COATINGS; ELECTRON MICROSCOPY; ETCHING; HARDNESS TESTING; PHYSICAL VAPOR DEPOSITION; SURFACE MORPHOLOGY; SURFACE ROUGHNESS;

CATHODIC ARC PHYSICAL VAPOUR DEPOSITION; ION ETCHING; MACRODROPLET; TITANIUM NITRIDE COATINGS;

TITANIUM NITRIDE;

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; COATINGS; ELECTRON MICROSCOPY; ETCHING; HARDNESS TESTING; PHYSICAL VAPOR DEPOSITION; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; TITANIUM NITRIDE;

EID: 37749035673 PISSN: 09215093 EISSN: None Source Type: Journal
DOI: 10.1016/j.msea.2007.04.030 Document Type: Article

Times cited : (29)

References (12)

1
- 0031166807
- Petrov I., Losbichler P., Bergstrom D., Greene J.E., Münz W.-D., Hurkmans T., and Trinh T. Thin Solid Films 302 (1997) 179-192
- (1997) Thin Solid Films , vol.302 , pp. 179-192
- Petrov, I.¹ Losbichler, P.² Bergstrom, D.³ Greene, J.E.⁴ Münz, W.-D.⁵ Hurkmans, T.⁶ Trinh, T.⁷

2
- 0031140794
- Münz W.-D., Smith I.J., Lewis D.B., and Creasey S. Vacuum 48 5 (1997) 473-481
- (1997) Vacuum , vol.48 , Issue.5 , pp. 473-481
- Münz, W.-D.¹ Smith, I.J.² Lewis, D.B.³ Creasey, S.⁴

3
- 27744526845
- Mubarak A., Hamzah E., Toff M.R.M., and Hasim A.H. Surf. Rev. Lett. 12 4 (2005) 631-643
- (2005) Surf. Rev. Lett. , vol.12 , Issue.4 , pp. 631-643
- Mubarak, A.¹ Hamzah, E.² Toff, M.R.M.³ Hasim, A.H.⁴

4
- 0043240329
- Matthews A., and Lefkow A.R. Thin Solid Films 126 (1985) 283-291
- (1985) Thin Solid Films , vol.126 , pp. 283-291
- Matthews, A.¹ Lefkow, A.R.²

5
- 0022797477
- Disatnik G., Boxman R.L., and Goldsmith S. IEEE Trans. Plasma Sci. PS-15 (1987) 520-523
- (1987) IEEE Trans. Plasma Sci. PS-15 , pp. 520-523
- Disatnik, G.¹ Boxman, R.L.² Goldsmith, S.³

6
- 16344365252
- Miernik K., Walkowicz J., and Bujak J. Plasmas Ions 3 (2000) 41-51
- (2000) Plasmas Ions , vol.3 , pp. 41-51
- Miernik, K.¹ Walkowicz, J.² Bujak, J.³

7
- 0034818416
- Mustapha N.M., and Howson R.P. Vacuum 60 (2001) 361-368
- (2001) Vacuum , vol.60 , pp. 361-368
- Mustapha, N.M.¹ Howson, R.P.²

8
- 0026242629
- Håkansson G., Hultman L., Sundgren J.-E., Greene J.E., and Münz W.-D. Surf. Coat. Technol. 48 (1991) 51-67
- (1991) Surf. Coat. Technol. , vol.48 , pp. 51-67
- Håkansson, G.¹ Hultman, L.² Sundgren, J.-E.³ Greene, J.E.⁴ Münz, W.-D.⁵

9
- 2442509813
- Harris S.G., Doyle E.D., Wong Y.-C., Munroe P.R., Cairney J.M., and Long J.M. Surf. Coat. Technol. 183 (2004) 283-294
- (2004) Surf. Coat. Technol. , vol.183 , pp. 283-294
- Harris, S.G.¹ Doyle, E.D.² Wong, Y.-C.³ Munroe, P.R.⁴ Cairney, J.M.⁵ Long, J.M.⁶

10
- 0343513738
- Petch N.J. Prog. Met. Phys. 5 (1954) 1-10
- (1954) Prog. Met. Phys. , vol.5 , pp. 1-10
- Petch, N.J.¹

11
- 0023310471
- Burnett P.J., and Rickerby D.S. Thin Solid Films 148 1 (1987) 41-50
- (1987) Thin Solid Films , vol.148 , Issue.1 , pp. 41-50
- Burnett, P.J.¹ Rickerby, D.S.²

12
- 10444263047
- Golombek K., Dobrzański L.A., and Soković M. J. Mater. Process. Technol. 157/158 (2004) 341-347
- (2004) J. Mater. Process. Technol. , vol.157-158 , pp. 341-347
- Golombek, K.¹ Dobrzański, L.A.² Soković, M.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.