Fabrication of silicon vertical taper structures using KOH anisotropic etching

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1430-1433

  Holly, Roman ^a   Hingerl, Kurt ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

KOH anisotropic etching; Light coupling; Silicon photonics; Vertical silicon taper

Indexed keywords

ANISOTROPY; CRYSTALLOGRAPHY; ETCHING; LIGHT TRANSMISSION; OPTICAL DEVICES; OPTICAL WAVEGUIDES;

KOH ANISOTROPIC ETCHING; LIGHT COUPLING; SILICON PHOTONICS; VERTICAL SILICON TAPER;

SILICON WAFERS;

EID: 33646026147     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.078     Document Type: Article

References (3)

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3. Sure A., Dillon T., Murakowski J., Lin C., Pustai D., and Prather D.W. Opt. Exp. 11 26 (2003)