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Volumn 110, Issue 1, 2009, Pages 61-66

Probing the local temperature by in situ electron microscopy on a heated Si3N4 membrane

Author keywords

Crystallization; Focused ion beam; In situ heating SEM and TEM; Nanoscale thermal properties

Indexed keywords

CRYSTALLIZATION; FOCUSED ION BEAMS; GOLD NANOPARTICLES; HEATING; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; HIGH TEMPERATURE OPERATIONS; NANOWIRES; SCANNING ELECTRON MICROSCOPY; SILICON COMPOUNDS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

EID: 70350584817     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2009.09.006     Document Type: Article
Times cited : (11)

References (25)
  • 18
    • 33749554122 scopus 로고    scopus 로고
    • Pearson Education, Upper Saddle River
    • C. Liu, Foundations of MEMS, Pearson Education, Upper Saddle River, 2006.
    • (2006) Foundations of MEMS
    • Liu, C.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.