Purification and crystallization of tungsten wires fabricated by focused-ion-beam-induced deposition

Applied Physics Letters

Volumn 86, Issue 19, 2005, Pages 1-3

  Prestigiacomo, M ^a   Bedu, F ^a   Jandard, F ^a   Tonneau, D ^a   Dallaporta, H ^a   Roussel, L ^b   Sudraud, P ^b  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b Chemin D partemental 56   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; CURRENT DENSITY; DEPOSITION; ELECTRIC CONDUCTIVITY; EVAPORATION; ION BEAMS; PURIFICATION; SCANNING ELECTRON MICROSCOPY;

DROPLETS; ELECTRICAL TREATMENT; FOCUSED-ION-BEAM-INDUCED DEPOSITION (FIBID); TUNGSTEN WIRES;

TUNGSTEN;

EID: 20844434495     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1927714     Document Type: Article

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